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Aluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications Engineering by Stuart Brodie, Richard FuAluminum Nitride Thin Film Acoustic Wave Device for Microfluidic and Biosensing Applications
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56Pages:
38Published:
Nov 2013A paper that tackles film bulk acoustic wave devices for microfluidic piezoelectric films and use of aluminum nitride as a common piezoelectric material for b...
Formats: PDF