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A Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method Technology by Sang-Kon KimA Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method
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28Pages:
31Published:
Nov 2013The objectives of this study are as follows: to make the physically corrected resist model based on the understanding of mechanistic behaviors that drive phot...
Formats: PDF